Rotary Evaporation Source Apparatus for OLED Evaporation

Abstract

The present disclosure discloses a rotary evaporation source apparatus for OLED evaporation, comprising a crucible for containing evaporation material, an evaporation source body for heating the crucible, a rotary disk for rotating the crucible, and a driving source member for driving the rotary disk to rotate; wherein the evaporation source body is provided with a receiving space for receiving the crucible therein, a through hole is disposed on the rotary disk, the rotary disk is movably laid over the evaporation source body, the crucible passes through the through hole disposed on the rotary disk and is placed in the receiving space, the crucible and the rotary disk are disposed in a relatively stationary manner; the driving source member is disposed at outside of the evaporation source body and drives the rotary disk to rotate about a central axis of the evaporation source body, the crucible rotates about the central axis of the evaporation source body along with the rotary disk.

Dependencies are inferred from the claim text.