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US 2016/0254342 A1Published application
Magnetic core, inductor, and method for fabricating the magnetic core
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYen-Shuo SU, Chun-Tsung KUO, Jiech-Fun LU
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Abstract
A magnetic core includes a center section having a substantially uniform thickness, and an edge section connected to and surrounding the center section. The edge section includes a bottom portion and a top portion disposed on the bottom portion, in which the bottom portion has a gradual side surface since the top portion has a steep side surface. The profile of the magnetic core can be more rectangular thereby providing better inductor performance.
Claims21
1-8. (canceled)
A magnetic core, comprising:
- a center section having a substantially uniform thickness;
- and
- an edge section connected to and surrounding the center section, the edge section comprising a bottom portion and a top portion disposed on the bottom portion, wherein the bottom portion has a gradual side surface since the top portion has a steep side surface.
A semiconductor device, comprising:
- a bottom conductive layer;
- a bottom dielectric layer formed on the bottom conductive layer;
- a magnetic core formed on the bottom dielectric layer, the magnetic core comprising:
- a center section having a substantially uniform thickness;
- and
- an edge section connected to and surrounding the center section, the edge section comprising a bottom portion and a top portion disposed on the bottom portion, wherein a side surface of the top portion is steeper than that of the bottom portion;
- a top dielectric layer formed on the magnetic core;
- and
- a top conductive layer formed on the top dielectric layer.
6 more elements
Dependencies are inferred from the claim text.