Wafer Holder
AssigneeHermes-Epitek Corporation
InventorsTakahiro Oishi, Kian-Poh Wong, Tsan-Hua Huang, Shih-Yung Shieh
Life of this patent
Estimating the term…
Abstract
A wafer holder includes a holder main body, a supporting member, and a limiting member. The holder main body has a through hole region. The supporting member has a supporting main body and supporting legs. The supporting main body is disposed on an inner surface of the through hole region, and the supporting legs are attached to an inner surface of the supporting main body and configured to support a wafer. The limiting member is attached to the supporting main body and disposed between two adjacent supporting legs and opposite to a flat side of the wafer.
Claims10
A wafer holder, comprising:
- a holder main body having a through hole region;
- a supporting member wherein the supporting member comprises:
- a supporting main body disposed on the through hole region;
- and
- a plurality of supporting legs attached to an inner surface of the supporting main body and configured to support a wafer;
- and
- a limiting member attached to the supporting main body and disposed between two adjacent supporting legs, wherein the limiting member is opposite to a flat side of the wafer.
Dependencies are inferred from the claim text.