Wafer Stage Having Function of Anti-Collision

Abstract

A silicon wafer platform with anti-collision function comprises a silicon wafer platform body (1) and a cable platform (2). The cable platform (2) is mounted on one side of the silicon wafer platform. The silicon wafer platform comprises three airbags (3), four damping buffer elements (4) and an air source (6), the three airbags (3) being connected in series and respectively secured on the other three sides of the silicon wafer platform by an airbag support (5), two adjacent airbags (3) communicating with a gas pipeline by one damping buffer element (4), and the gas pipeline being secured on the cable platform (2) and communicating with the air source. When two silicon platforms collide, the collision is buffered by the airbags and the silicon wafer platforms are not bounced off.

Dependencies are inferred from the claim text.