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US 2015/0177609 A1Published application
Method for evaluating optical image of pattern, recording medium, and information processing apparatus
AssigneeCanon Kabushiki Kaisha
InventorsKoji Mikami, Tadashi Arai
Life of this patent
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Abstract
A method being performed by a processor includes, acquiring data of patterns of a plurality of cells that include an identified pattern for which an evaluation value of an optical image falls outside a first allowable range among patterns in which each a pattern being single cell alone, creating the pattern of a mask by arranging the patterns of the plurality of cells that include the identified pattern, and evaluating an optical image of the identified pattern in the created pattern of the mask.
Claims20
A method performed by a processor comprising:
- acquiring data of patterns of a plurality of cells that include an identified pattern for which an evaluation value of an optical image falls outside a first allowable range among patterns in which each pattern being a single cell alone;
- creating the pattern of a mask by arranging the patterns of the plurality of cells that include the identified pattern;
- and
- evaluating an optical image of the identified pattern in the created pattern of the mask.
1 more element
Dependencies are inferred from the claim text.