Integrated circuits with copper hillock-detecting structures and methods for detecting copper hillocks using the same

Abstract

Integrated circuits with copper hillock-detecting structures and methods for detecting copper hillocks using the same are disclosed. In an exemplary embodiment, an integrated circuit includes a copper hillock-detecting structure. The copper hillock-detecting structure includes a copper metallization layer and an intermediate plate structure adjacent to the copper metallization layer. The intermediate plate structure includes a conducting material plate. The intermediate plate structure further includes a plurality of vias electrically and physically connected with the conducting material plate. The copper hillock-detecting structure further includes a sensing plate adjacent to the intermediate plate and electrically and physically connected with the plurality of vias.

Dependencies are inferred from the claim text.