Substrate carrying device
AssigneeTokyo Electron Limited
InventorToshiaki TOYOMAKI
Life of this patent
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Abstract
A substrate carrying device includes pads that hold a substrate, and a hand having recesses formed therein. The pads are placed in the recesses and detachably attached to the hand. Each of the pads includes a flange, and the flange of at least one of the pads includes an outer peripheral part detachably attached to the hand, an elastic part that is able to bend in the recess, and a substrate holding part that rises from an inner edge of the elastic part and holds the substrate by vacuum suction.
Claims8
A substrate carrying device, comprising:
- a plurality of pads that hold a substrate, each of the pads including a flange;
- and
- a hand having recesses formed therein, each of the pads being placed in a recess of the recesses and detachably attached to the hand,
- wherein the flange of at least one of the pads includes
- an outer peripheral part detachably attached to the hand,
- an elastic part that is able to bend in the recess, and
- a substrate holding part that rises from an inner edge of the elastic part and holds the substrate by vacuum suction.
A pad placed in a recess formed in a hand of a substrate carrying device and detachably attached to the hand, the pad comprising:
- a flange that includes
- an outer peripheral part detachably attached to the hand,
- an elastic part that is able to bend in the recess, and
- a substrate holding part that rises from an inner edge of the elastic part and holds a substrate by vacuum suction.
Dependencies are inferred from the claim text.