Exposure apparatus and device manufacturing method

An exposure apparatus that exposes a substrate while liquid is filled between a projection optical system and the substrate, the exposure apparatus comprising:

• a measuring member disposed in a substrate stage for holding the substrate, at a side of a surface holding the substrate of the substrate stage;
• an auxiliary member disposed at a side of the surface of the substrate stage, with a gap with the measuring member;
• and
• a sealing member contacting a surface of the auxiliary member, disposed to cover the gap, and for suppressing penetration of the liquid locating on a surface of the measuring member or the surface of the auxiliary member into the gap,
• wherein the sealing member includes
• a fixing member adhered to the surface of the measuring member, and
• a second water-repellent part for suppressing the contact between the fixing member and the liquid locating on the surface of the measuring member.

An exposure apparatus that exposes a substrate while liquid is filled between a projection optical system and the substrate, the exposure apparatus comprising:

• a measuring member disposed in a substrate stage for holding the substrate;
• an auxiliary member disposed in the substrate stage, with a gap with the measuring member;
• a sealing member contacting a surface of the auxiliary member and disposed to cover the gap,
• wherein the sealing member includes an adhesive layer, and the sealing member has a cutout structure at an edge in a measuring member side, for contacting a part of the adhesive layer with gas, while the liquid is on the measuring member.

A device manufacturing method comprising:

• exposing a substrate using an exposure apparatus that exposes a substrate while liquid is filled between a projection optical system and the substrate, the exposure apparatus comprising:
• a measuring member disposed in a substrate stage for holding the substrate, at a side of a surface holding the substrate of the substrate stage;
• an auxiliary member disposed at a side of the surface of the substrate stage, with a gap with the measuring member;
• and
• a sealing member contacting a surface of the auxiliary member, disposed to cover the gap, and for suppressing penetration of the liquid locating on a surface of the measuring member or the surface of the auxiliary member into the gap,
• wherein the sealing member has a shape forming a space where a part of the surface of the measuring member contacts gas, while the liquid is on the surface of the measuring member and the liquid contacts an edge of the sealing member;
• and
• developing the exposed substrate.

A device manufacturing method comprising:

• exposing a substrate using an exposure apparatus that exposes a substrate while liquid is filled between a projection optical system and the substrate, the exposure apparatus comprising:
• a measuring member disposed in a substrate stage for holding the substrate, at a side of a surface holding the substrate of the substrate stage;
• an auxiliary member disposed at a side of the surface of the substrate stage, with a gap with the measuring member;
• and
• a sealing member contacting a surface of the auxiliary member, disposed to cover the gap, and for suppressing penetration of the liquid locating on a surface of the measuring member or the surface of the auxiliary member into the gap,
• wherein the sealing member includes
• a fixing member adhered to the surface of the measuring member, and
• a second water-repellent part for suppressing the contact between the fixing member and the liquid locating on the surface of the measuring member;
• and
• developing the exposed substrate.

A device manufacturing method comprising:

• exposing a substrate using an exposure apparatus that exposes a substrate while liquid is filled between a projection optical system and the substrate, the exposure apparatus comprising:
• a measuring member disposed in a substrate stage for holding the substrate;
• an auxiliary member disposed in the substrate stage, with a gap with the measuring member;
• a sealing member contacting a surface of the auxiliary member and disposed to cover the gap,
• wherein the sealing member includes an adhesive layer, and the sealing member has a cutout structure at an edge in a measuring member side, for contacting a part of the adhesive layer with gas, while the liquid is on the measuring member;
• and
• developing the exposed substrate.