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US 2015/0104276 A1Published application
Overhead hoist transport system
AssigneeInotera Memories, Inc.
InventorsChi-Ming Lee, Tsan-I Chen
Life of this patent
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Abstract
The present invention provides an overhead hoist transport system, which includes a rail, a stocker disposed under the rails, wherein the stocker can move along the direction of the rail, and a cleaning station, disposed on the rail to clean the stocker directly when the stocker is moving.
Claims8
An overhead hoist transport system, comprising:
- a rail;
- a stocker, disposed under the rail, moving along the direction of the rail;
- and
- a cleaning station, disposed on the rail, cleaning the moving stocker under the rail.
1 more element
Dependencies are inferred from the claim text.