US 2014/0370199 A1 · LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE MEDIUM

Abstract

A liquid processing apparatus includes multiple substrate holding units each configured to horizontally hold a substrate and arranged in a left/right direction; a moving unit that is spaced from an arrangement of the substrate holding units in a forward/backward direction and is moved in the left/right direction; a nozzle standby unit, provided between a movement path of the moving unit and the arrangement of the substrate holding units, at which a nozzle that supplies a processing liquid to the substrate held by the substrate holding unit is on standby; and a rotatable arm having one end at which a nozzle holding unit that detachably holds the nozzle and the other end rotatably provided at the moving unit. The nozzle is transferred between the nozzle standby unit and a supply position where the processing liquid is supplied to the substrate together by the moving unit and the rotatable arm.

Claims12

Dependent claims

A liquid processing apparatus comprising:

multiple substrate holding units each configured to horizontally hold a substrate and arranged in a left/right direction;
a moving unit that is provided to be spaced from an arrangement of the substrate holding units in a forward/backward direction and is configured to be moved in the left/right direction;
a nozzle standby unit, provided between a movement path of the moving unit and the arrangement of the substrate holding units, at which at least one nozzle configured to supply a processing liquid to the substrate held by the substrate holding unit is on standby;
and
a rotatable arm having one end at which a nozzle holding unit configured to detachably hold the at least one nozzle and the other end rotatably provided at the moving unit, wherein the at least one nozzle is transferred between the nozzle standby unit and a supply position where the processing liquid is supplied to the substrate together by the moving unit and the rotatable arm.

2 more elements

A liquid processing method comprising:

moving a moving unit along a left/right direction, the moving unit being provided to be spaced apart from an arrangement of substrate holding units in a forward/backward direction, and the substrate holding units each holding a substrate and being arranged in the left/right direction;
allowing at least one nozzle configured to supply a processing liquid to the substrate held by the substrate holding unit to be on standby at a nozzle standby unit provided between a movement path of the moving unit and the arrangement of the substrate holding units;
detachably holding the at least one nozzle by a nozzle holding unit provided at one end of a rotatable arm configured to be horizontally rotated, the other end of the rotatable arm being provided at the moving unit;
and
transferring the at least one nozzle between the nozzle standby unit and a supply position where the processing liquid is supplied to the substrate together by the movement of the moving unit and the rotation of the rotatable arm.

2 more elements

Dependencies are inferred from the claim text.

Liquid processing apparatus, liquid processing method, and storage medium

Life of this patent

Liquid processing apparatus, liquid processing method, and storage medium

Life of this patent

Abstract

Claims12