Wafer holding apparatus
AssigneeSamsung Electronics Co., Ltd.
InventorsHyun-Ho CHO, Hyeog-Ki KIM, Kwang-Shin LIM
Life of this patent
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Abstract
A wafer holding apparatus including a container body having a space to receive a wafer and a front opening, a door disposed at the front opening, and a first supporting part disposed on an inner wall of the door may be provided. For example, the first supporting part may include a frame coupled to the inner wall of the door, a plurality of elastic ribs protruding from the frame, a support structure coupled to the plurality of elastic ribs and defining a plurality of grooves, which is spaced apart from the door by the elastic ribs and configured to receive a peripheral portion of the wafer.
Claims20
A wafer holding apparatus comprising:
- a container body including a space and a front opening, the space configured to receive a wafer;
- a door at the front opening;
- and
- a first supporting part on an inner wall of the door, the first supporting part including,
- a frame mounted on the inner wall of the door,
- a plurality of elastic ribs protruding from the frame and
- a support structure coupled to the plurality of elastic ribs and defining a plurality of grooves, the plurality of grooves spaced apart from the door by the elastic ribs and configured to receive a peripheral portion of the wafer.
A wafer holding apparatus comprising:
- a container having an open side configured to receive a wafer therethrough;
- a door configured to close the open side, and
- a supporting part coupled to the door and including at least one groove configured to hold a peripheral portion of the wafer.
Dependencies are inferred from the claim text.