Compositon for forming metal oxide-containing film and patterning process

A composition for forming a metal oxide-containing film comprising:

• as a component (A), a metal oxide-containing compound A1 obtained by hydrolysis and/or condensation of one or more kinds of hydrolysable metal compounds shown by the following general formula (A-1),
• L(OROA)a0(OR1A)a1(O)a2 (A-1)
• wherein, R0A and R1A represent an organic group having 1 to 30 carbon atoms;
• a0, a1 and a2 represent an integer of 0 or more and a0+a1+2×a2 is the same number as the number determined by valency of L;
• L is any of aluminum, gallium, yttrium, titanium, zirconium, hafnium, bismuth, tin, vanadium, and tantalum,
• as a component (B), an aromatic compound shown by the following general formula (B-1), the compound generating a hydroxyl group by thermal and/or an acid,
• wherein, d1 and d3 represent an integer of 1, 2 or 3;
• d2 represents an integer of 0, 1 or 2;
• E and G represent a single bond or a divalent organic group composed of one or more of carbon, oxygen and hydrogen atom;
• each D1, D2 and D3 may be the same or different and represents an organic group shown by the following general formula (B-1a) or (B-1b),
• wherein, each R1, R2 and R3 may be the same or different and represents an organic group shown by the following general formula (B-1c), (B-1d) or (B-1e);
• each R4, R5 and R6 may be the same or different and represents a hydrogen atom or an alkyl group having 1 to 20 carbon atoms, and two alkyl groups may be bonded to form a cyclic substituent.
• wherein, Q1B to Q4B represent a hydrogen atom or an alkyl group having 1 to 20 carbon atoms, and two substituents arbitrarily selected from Q1B to Q4B may be bonded to form a cyclic substituent;
• Q5B to Q7B represent an alkyl group having 1 to 20 carbon atoms, and two substituents arbitrarily selected from Q5B to Q7B may be bonded to form a cyclic substituent;
• and Q8B and Q9B represent an alkyl group having 1 to 20 carbon atoms, and Q8B and Q9B may be bonded each other to form a cyclic substituent.