Splashguard and Inlet Diffuser for High Vacuum, High Flow Bubbler Vessel

A process of delivering a chemical precursor vapor from a bubbler for storing a volatile liquid chemical and delivering vapor of the volatile liquid chemical to a vapor deposition process when under vacuum, wherein the bubbler comprises the bubbler comprising a cylindrical inside wall having a diameter, a floor, a diptube inlet ending in an outlet proximate the floor and at least one baffle disc positioned between the outlet of the diptube and an outlet of the bubbler, wherein the at least one baffle disc has a circumferential edge and a diameter slightly less than the diameter of the inside wall such that the space between the circumferential edge of the baffle disc and the cylindrical inside wall is sufficient to allow the vapor of the volatile liquid to pass through the space with minimum pressure drop, but sufficiently narrow to minimize the passage of liquid that may be ejected from a volatile liquid content under vacuum conditions and high flow rates of a carrier gas through the diptube, wherein the at least one baffle disc is solid and has a concave downward shape to collect condensed volatile liquid chemical for return by coalesced droplets that fall back into the stored volatile liquid chemical, said process comprising the steps of:

• passing the carrier gas through the diptube outlet;
• entraining the volatile liquid chemical precursor from the bubbler into the carrier gas;
• and
• passing the entrained volatile liquid chemical precursor and carrier gas past the at least one baffle disc between the circumferential edge and the diameter of the cylindrical inside wall,
• wherein in operation under vacuum conditions, the bubbler is capable of preventing liquid droplets from entering the outlet of the bubbler.