Control circuitry routing configuration for mems devices
AssigneeHarris Corporation
InventorJohn E. Rogers
Life of this patent
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Abstract
A method for constructing a MEMS system includes first depositing on a surface of a substrate a first plurality of thin film layers formed of dielectric material. The first plurality of thin-film layers includes at least one conductive trace extending a distance on the substrate, parallel to the surface. A second plurality of layers is then deposited to form at least one MEMS device. The MEMS device is responsive to a control signal applied to a first input terminal and an electrical connection is formed from the conductive trace to the input terminal.
Claims18
A method for constructing a MEMS system, comprising:
- first depositing on a surface of a substrate a first plurality of thin film layers formed of dielectric material;
- including in said first plurality of thin-film layers at least one conductive trace extending a distance on said substrate, parallel to said surface;
- second depositing over said plurality of thin-film layers a second plurality of layers including at least one layer each of a conductive material and a dielectric material to form at least one MEMS device which is responsive to a control signal applied to a first input terminal;
- forming an electrical connection from said at least one conductive trace to said input terminal.
A MEMS system, comprising:
- a first plurality of thin film layers formed of dielectric material deposited on a surface of a substrate;
- at least one conductive trace included in said first plurality of thin-film layers extending a distance on said substrate, parallel to said surface;
- a second plurality of layers deposited over said first plurality of thin-film layers including at least one layer each of a conductive material and a dielectric material arranged to form at least one MEMS device which is responsive to a control signal applied to a first input terminal;
- and
- an electrical connection formed from said at least one conductive trace to said input terminal.
Dependencies are inferred from the claim text.