Wafer carrier and applications thereof

A wafer transport system, comprising:

• at least a wafer carrier including:
• a body having at least a sidewall and a wafer receiving cavity, wherein the wafer receiving cavity extends into the body from an opening formed on the sidewall;
• a door disposed out of the opening;
• and
• a plurality of stages in contact with the sidewall for supporting the body, respectively;
• and
• a conveying device for transferring the wafer carrier among a plurality of wafer processing machines.

A wafer transport system, comprising:

• at least a wafer carrier including:
• a body having a wafer receiving cavity;
• a door, is disposed out of the wafer receiving cavity;
• and
• a stage, for supporting the body;
• and
• an overhead transport vehicle for overturning the wafer carrier during transferring the wafer carrier such that the stage forms a non-zero angle with a horizontal plane.

A wafer the buffer/stocker system comprising:

• at least a wafer carrier including:
• a body having a wafer receiving cavity;
• a door disposed out of the wafer receiving cavity;
• and
• at least a stage for supporting the body;
• a conveying port for receiving the stage;
• an overturning device for overturning the wafer carrier such that the stage forms a non-zero angle with a horizontal plane;
• and
• a stocker area for storing the wafer carrier after it is overturned.

A wafer transport method comprising:

• using a wafer carrier to support at least a wafer, wherein the wafer carrier includes:
• a body having a wafer receiving cavity;
• a door disposed out of the wafer receiving cavity;
• and
• a stage for supporting the body;
• using an overhead transport vehicle to transfer the wafer carrier among a plurality of wafer processing machines, and perform an overturning step to the wafer carrier such that an active surface of the wafer form a non-zero angle with a horizontal plane.