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US 2014/0150245 A1Published application
Pneumatic Clamping Mechanism for Cells with Adjustable Height
AssigneeIntermolecular, Inc.
InventorAaron T. Francis
Life of this patent
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Abstract
In some embodiments of the present disclosure, an apparatus for combinatorial wet processing includes: a chuck, a substrate located on the chuck, a cell located over the substrate; and a height adjustment mechanism for the cell above the substrate wherein applying compressed air on an O-ring in a gland prevents vertical movement of the cell relative to the position of the substrate.
Claims14
An apparatus for combinatorial wet processing comprising:
- a chuck operable to hold a wafer thereon;
- a plurality of cells disposed over the chuck;
- and
- a structure disposed around each of the cells;
- wherein the structure comprises a gland and an O-ring;
- wherein the O-ring is operable to maintain a height for each of the cells above the chuck when compressed air is applied to the O-ring.
3 more elements
An apparatus comprising:
- a chuck operable to hold a wafer thereon, wherein the wafer has a plurality of site-isolated regions and interstitial regions defined on a surface of the wafer;
- a cylindrical cell disposed over each of the site-isolated regions;
- and
- a pneumatic clamping mechanism operable to prevent vertical motion of the cylindrical cell relative to the site-isolated region.
1 more element
A method of combinatorial wet processing site-isolated regions on a substrate comprising:
- specifying a height for a cell disposed over a site-isolated region of the substrate,
- moving the cell vertically above the site-isolated region,
- stopping at the specified height,
- applying pressurized gas to move an O-ring in a gland against a wall of the cell,
- maintaining the specified height, and
- performing a process on the site-isolated region.
3 more elements
Dependencies are inferred from the claim text.