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US 2013/0298087 A1Published application
Dose-data generating apparatus
AssigneeKabushiki Kaisha Toshiba
InventorsYosuke Okamoto, Takashi Koike
Life of this patent
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Abstract
According to one embodiment, generating virtual data by mirroring data based on a dimension measurement result in a measurement region on an inner side of a shot region to a non-shot region on an outer side of a shot edge, and calculating dose data of the measurement region and a non-measurement region based on data in the measurement region and the virtual data are included.
Claims10
A dose-data generating apparatus comprising:
- a virtual-data generating unit that generates virtual data by mirroring data based on a dimension measurement result in a measurement region on an inner side of a shot region to a non-shot region on an outer side of a shot edge;
- a dose-data calculating unit that calculates dose data of the measurement region and a virtual measurement region for which the virtual data is generated based on data in the measurement region and the virtual data;
- and
- a shot-region cutout unit that cuts a shot region out of the measurement region and the virtual measurement region for which the dose data is calculated.
1 more element
Dependencies are inferred from the claim text.