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AssigneesJnc Corporation, Toho Titanium Co., Ltd., JX Nippon Mining & Metals Corporation
InventorsShuichi Ohkubo, Masatsugu Yamaguchi
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To provide an apparatus for producing polycrystalline silicon and a method therefor to allow improvement in efficiency of polycrystalline silicon production by minimizing reactor downtime and to allow polycrystalline silicon production at a relatively low cost and in a large amount in a zinc reduction process for recovering formed silicon in a solid state. In a silicon producing apparatus for producing polycrystalline silicon by reducing silicon tetrachloride with zinc, vertical reactor 1 has reactor upper body 2 and reactor lower body 3 that can be vertically detached, and reactor lower body 3 is movable in up-and-down and left-right directions.
An apparatus for producing polycrystalline silicon by reducing silicon tetrachloride with zinc, the apparatus comprising a reactor constituted of a reactor upper body and a reactor lower body that can be vertically separated, wherein a zinc gas feed line and a silicon tetrachloride gas feed line are connected to an upper part of the reactor upper body, an outlet of a zinc chloride-containing exhaust gas generated in a reaction is arranged at a lower part of the reactor upper body, or at an upper part of the reactor lower body, and the reactor lower body is arranged movably in up-and-down and left-right directions.
Dependencies are inferred from the claim text.