Apparatus and method for measuring radiation energy during thermal processing
AssigneeApplied Materials, Inc.
InventorsJoseph M. Ranish, Blake Koelmel, Aaron Muir Hunter
Life of this patent
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Abstract
Embodiments of the present invention provide apparatus and method for reducing heating source radiation influence in temperature measurement during thermal processing. In one embodiment of the present invention, background radiant energy, such as an energy source of a thermal processing chamber, is marked within a selected spectrum, a characteristic of the background is then determined by measuring radiant energy at a reference wavelength within the selected spectrum and a comparing wavelength just outside the selected spectrum.
Claims12
A method for processing a substrate, comprising:
- directing radiant energy from an energy source towards a processing volume of a thermal processing chamber;
- marking the radiation energy directed from the energy source to the processing volume;
- positioning the substrate in the processing volume;
- measuring radiant energy within the processing volume;
- determining a characteristic of the radiant energy from the energy source using the measured radiant energy within the processing volume and the marking of the radiant energy from the energy source;
- and
- determining a temperature of the substrate using the measured radiant energy within the processing volume and the determined characteristic of the radiant energy from the energy source.
A method for processing a substrate, comprising:
- directing radiant energy from an energy source towards a processing volume of a thermal processing chamber;
- marking the radiation energy directed from the energy source to the processing volume;
- positioning the substrate in the processing volume;
- measuring radiant energy in the processing volume at a reference wavelength;
- determining a characteristic of the radiant energy from the measurement at the reference wavelength;
- measuring radiant energy in the processing volume at a measuring wavelength;
- and
- determining a temperature of the substrate using measurement at the measuring wavelength and the determined characteristics of radiant energy from the energy source.
Dependencies are inferred from the claim text.