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US 2013/0280522 A1Published application
Surface treatment method for diamond-like carbon layer and coated article manufactured by the method
OwnerDa-Hua Caoinventor
Life of this patent
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Abstract
A surface treatment method for diamond-like carbon layer include at least the following steps: a substrate is provided; a diamond-like carbon layer is formed on the substrate by ion beam assisted magnetron sputtering deposition; fluorine ions and silicone ions is doped in the diamond-like carbon layer at a temperature of about 400° C. to about 600° C. A coated article manufactured by the method is also provided.
Claims15
A surface treatment method for diamond-like carbon layer, comprising:
- providing a substrate;
- depositing a diamond-like carbon layer on the substrate by magnetron sputtering deposition;
- doping fluorine ions and silicone ions in the diamond-like carbon layer at a temperature of about 400° C. to about 600° C.
A coated article, comprising:
- a substrate;
- and
- a diamond-like carbon layer formed on the substrate, the diamond-like carbon comprising fluorine element and silicon element.
Dependencies are inferred from the claim text.