Machine learning approach to correct lithographic hot-spots

A computer usable program product comprising a computer usable storage device including computer usable code for detecting and correcting lithographic hot-spots in an integrated circuit (IC) design, the computer usable code comprising:

• computer usable code for receiving at a machine learning model (ML model) a layout corresponding to the IC design;
• computer usable code for identifying, at the ML model using a hardware component, a set of input objects corresponding to a target shape in the layout;
• and
• computer usable code for predicting a retargeting value for the target shape using the set of input objects, such that applying the retargeting value to the target shape in the layout causes the target shape to be modified into a modified target shape, wherein printing the modified target shape instead of the target shape eliminates a lithographic hot-spot that would otherwise occur from printing the target shape in a printed circuit corresponding to the IC design.

A data processing system for detecting and correcting lithographic hot-spots in an integrated circuit (IC) design, the data processing system comprising:

• a storage device, wherein the storage device stores computer usable program code;
• and
• a processor, wherein the processor executes the computer usable program code, and wherein the computer usable program code comprises:
• computer usable code for receiving at a machine learning model (ML model) a layout corresponding to the IC design;
• computer usable code for identifying, at the ML model using a hardware component, a set of input objects corresponding to a target shape in the layout;
• and
• computer usable code for predicting a retargeting value for the target shape using the set of input objects, such that applying the retargeting value to the target shape in the layout causes the target shape to be modified into a modified target shape, wherein printing the modified target shape instead of the target shape eliminates a lithographic hot-spot that would otherwise occur from printing the target shape in a printed circuit corresponding to the IC design.