Spray rejuvenation of sputtering targets

A method of refurbishing an eroded sputtering target having an eroded region with a depressed surface contour that is non-planar and that defines a maximum surface depth, the eroded sputtering target comprising a target material, the method comprising:

• positioning a spray-deposition gun over the eroded region and initiating spray deposition of a jet of particles of the target material at a first location to partially fill the eroded region, an obliquity angle between the spray-deposition gun and the eroded region immediately thereunder being approximately 45° or greater;
• and
• substantially filling the eroded region by spray-depositing particles of the target material while (i) translating the spray-deposition gun relative to the eroded sputtering target, (ii) changing the obliquity angle to a plurality of different values selected from the range of approximately 45° to approximately 90°, and (iii) at each location over the eroded sputtering target, controlling a deposition rate of the particles of the target material based on a depth of the eroded region at the location.