Pattern transfer apparatuses and methods for controlling the same

A control method for a pattern transfer apparatus including a first stage on which a substrate is located, a second stage onto which a functional material is spread, and a microscope moving between the first stage and the second stage, the control method comprising:

• moving the microscope integrated with a stamp to the second stage;
• controlling contact between the functional material and the stamp such that the functional material is spread onto a pattern of the stamp;
• moving the microscope integrated with the stamp to the first stage after completing the spreading of the functional material onto the pattern of the stamp;
• checking the substrate through the microscope integrated with the stamp;
• controlling contact between the microscope integrated with the stamp and the substrate such that the pattern of the stamp is transferred to the substrate;
• and
• moving the microscope integrated with the stamp away from the substrate after completing the transferring of the pattern to the substrate.

A pattern transfer apparatus comprising:

• a first stage configured to support a substrate;
• and
• a transfer unit including,
• an ocular lens and at least one objective lens coupled to the ocular lens through a connection structure, the at least one objective lens configured to face the first stage, the ocular lens configured to magnify an image magnified by the objective lens, and
• a stamp removably coupled to the objective lens, the stamp including a background part embossed or engraved with a pattern.