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US 2013/0156537 A1Published application
Carrier and substrate unloading method using the same
AssigneeIndustrial Technology Research Institute
InventorsPo-Yuan Lo, Ru-De Chen
Life of this patent
Estimating the term…
Abstract
A carrier and a substrate unloading method using the same are provided. The carrier comprises a bottom board, a rim and a stop board. The bottom board is for carrying a substrate. The rim is disposed on a periphery of the bottom board. The rim has at least one opening. The stop board is disposed on the rim. One end of the stop board is pivotally connected to the rim, and the other end of the stop board is rotated to the outside or the inside of the rim.
Claims13
A carrier, comprising:
- a bottom board used for carrying a substrate;
- a rim disposed on a periphery of the bottom board, wherein the rim has at least one opening;
- and
- at least one stop board disposed on the rim, wherein one end of the stop board is pivotally connected to the rim, and the other end of the stop board is rotated to the outside or the inside of the rim.
1 more element
A substrate unloading method for a carrier, wherein the method comprises:
- providing a carrier which comprises a bottom board, a rim and at least one stop board, wherein the bottom board is for carrying a substrate, the bottom board has at least one through hole, the rim is disposed on a periphery of the bottom board, the rim has at least one opening, the stop board is disposed on the rim, and one end of the stop board is pivotally connected to the rim;
- rotating the other end of the stop board to the outside of the rim;
- lifting the substrate by a high-pressure gas or a pole passing through the through hole;
- and
- taking out the substrate through the opening by a robotic arm.
2 more elements
Dependencies are inferred from the claim text.