Two way gate valve and substrate processing system having the same

A substrate processing system comprising:

• a first chamber;
• a second chamber;
• a valve chamber having a first entrance coupled with the first chamber, a second entrance coupled with the second chamber, and an openable and closable chamber cover;
• a moving module having a first sealing plate for sealing the first entrance, a sealing plate for sealing the second entrance, and a moving module body to which the first and second sealing plates are mounted;
• a push-pull module having a push-pull module body coupled with the moving module body such that the moving module body can linearly move, a first operating body for moving the moving module in a first entrance direction such that the first sealing plate seals the first entrance, and a second operating body for moving the moving module in a second entrance direction such that the second sealing plate seals the second entrance;
• a first driving means for driving the first operating body;
• a second driving means for driving the second operating body;
• and
• a third driving means for moving the push-pull module between an operation position and a standby position,
• wherein, when the push-pull module is moved to the operation position by the third driving means, the first operating body is operated by the first driving means or the second operating body is operated by the second driving means, so that one of the first entrance and the second entrance is selectively sealed.