Substrate Processing Fluid Delivery System and Method

A method for delivering a processing fluid to a processing chamber comprising:

• providing a fluid conduit assembly coupled to a flow regulator, a plurality of processing fluid containers, a plurality of valves, and an interface of the processing chamber;
• setting the plurality of valves to a first configuration, wherein the fluid conduit assembly and the processing fluid containers are arranged such that when the plurality of valves are in the first configuration, one of the plurality of processing fluid containers is in fluid communication with the flow regulator through the fluid conduit assembly, but not in fluid communication with the interface of the processing chamber;
• and
• setting the plurality of valves to a second configuration, wherein the fluid conduit assembly and the processing fluid containers are arranged such that when the plurality of valves are in the second configuration, the one of the plurality of processing fluid containers is in fluid communication with the interface of processing chamber through the fluid conduit assembly, but not in fluid communication with the flow regulator.

A substrate processing system comprising:

• a substrate processing apparatus comprising a processing chamber, the process chamber comprising an interface;
• a fluid conduit assembly in fluid communication with the interface of the processing chamber;
• a flow regulator in fluid communication with the fluid conduit assembly;
• a plurality of processing fluid containers in fluid communication with the fluid conduit assembly;
• and
• a plurality of valves coupled to the fluid conduit assembly, the plurality of valves being configurable to selectively place each of the plurality of processing fluid containers in fluid communication with either the flow regulator or the interface of the processing chamber through the fluid conduit assembly.