Liquid processing apparatus, liquid processing method and storage medium

A liquid processing method, comprising:

• a first process that includes supplying a first processing liquid to a substrate held in a processing space from a first nozzle and discharging the first processing liquid within the processing space from a first discharge path through a discharge mechanism;
• after the first process, a second process that includes supplying a second processing liquid to the substrate held in the processing space from a second nozzle and discharging the second processing liquid within the processing space from a second discharge path through the discharge mechanism;
• after stop supplying of the first processing liquid and prior to beginning of the second process, performing a nozzle switching operation from the first nozzle to the second nozzle and a discharge mechanism switching operation from the first discharge path to the second discharge path;
• and
• determining a longer one of a time required to perform the nozzle switching operation and a time required to perform the discharge mechanism switching operation as a maximum preparation time, and beginning the nozzle switching operation and the discharge mechanism switching operation at an earlier time than the completion time of the first process by the maximum preparation time or more.

A liquid processing method, comprising:

• a first process that includes supplying a first processing liquid to a substrate held in a processing space from a first nozzle, discharging the first processing liquid within the processing space from a first discharge path through a discharge mechanism and exhausting a gas generated from the first processing liquid through a first exhaust mechanism;
• after the first process, a second process that includes supplying a second processing liquid to the substrate held in the processing space from a second nozzle, discharging the second processing liquid within the processing space from a second discharge path through the discharge mechanism and exhausting a gas generated from the second processing liquid through a second exhaust mechanism;
• after stop supplying of the first processing liquid and prior to beginning of the second process, performing a nozzle switching operation from the first nozzle to the second nozzle, a discharge mechanism switching operation from the first discharge path to the second discharge path and an exhaust mechanism switching operation from the first exhaust mechanism to the second exhaust mechanism;
• and
• determining the longest one of a time required to perform the nozzle switching operation, a time required to perform the discharge mechanism switching operation and a time required to perform the exhaust mechanism switching operation as a maximum preparation time, and beginning the nozzle switching operation, the discharge mechanism switching operation and exhaust mechanism switching operation at an earlier time than the completion time of the first process by the maximum preparation time or more.

A non-transitory computer-readable storage medium having stored a computer executable program that, when executed, causes a computer to perform a liquid processing method comprising:

• a first process that includes supplying a first processing liquid to a substrate held in a processing space from a first nozzle and discharging the first processing liquid within the processing space from a first discharge path through a discharge mechanism;
• after the first process, a second process that includes supplying a second processing liquid to the substrate held in the processing space from a second nozzle and discharging the second processing liquid within the processing space from a second discharge path through the discharge mechanism;
• after stop supplying of the first processing liquid and prior to beginning of the second process, performing a nozzle switching operation from the first nozzle to the second nozzle and a discharge mechanism switching operation from the first discharge path to the second discharge path;
• and
• determining a longer one of a time required to perform the nozzle switching operation and a time required to perform the discharge mechanism switching operation as a maximum preparation time, and beginning the nozzle switching operation and the discharge mechanism switching operation at an earlier time than the completion time of the first process by the maximum preparation time or more.

A non-transitory computer-readable storage medium having stored a computer executable program that, when executed, causes a computer to perform a liquid processing method comprising:

• a first process that includes supplying a first processing liquid to a substrate held in a processing space from a first nozzle, discharging the first processing liquid within the processing space from a first discharge path through a discharge mechanism and exhausting a gas generated from the first processing liquid through a first exhaust mechanism;
• after the first process, a second process that includes supplying a second processing liquid to the substrate held in the processing space from a second nozzle, discharging the second processing liquid within the processing space from a second discharge path through the discharge mechanism, and exhausting a gas generated from the second processing liquid through a second exhaust mechanism;
• after stop supplying of the first processing liquid and prior to beginning of the second process, performing a nozzle switching operation from the first nozzle to the second nozzle, a discharge mechanism switching operation from the first discharge path to the second discharge path, and an exhaust mechanism switching operation from the first exhaust mechanism to the second exhaust mechanism;
• and
• determining the longest one of a time required to perform the nozzle switching operation, a time required to perform the discharge mechanism switching operation and a time required to perform the exhaust mechanism switching operation as a maximum preparation time, and beginning the nozzle switching operation, the discharge mechanism switching operation and exhaust mechanism switching operation at an earlier time than the completion time of the first process by the maximum preparation time or more.