Scanning probe microscope with compact scanner
AssigneeBruker Nano, Inc.
InventorsNghi Phan, Jeff Markakis, Johannes Kindt, Carl Masser
Life of this patent
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Abstract
A scanner for a scanning probe microscope (SPM) including a head has a scanner body that houses an actuator, and a sensor that detects scanner movement. The scanner body is removable from the head by hand and without the use of tools and has a total volume of less than about five (5) square inches. Provisions are made for insuring that movement of a probe device coupled to the scanner is restricted to be substantially only in the intended direction. A fundamental resonance frequency for the scanner can be greater than 10 kHz.
Claims20
A scanner for a scanning probe microscope (SPM) including a head, the scanner comprising:
- a scanner body housing an actuator and a sensor, the sensor detecting scanner movement;
- and
- wherein the scanner body is removable from the head by hand and without the use of tools and has a total volume of less than about five (5) square inches.
A method of operating an atomic force microscope (AFM) having a head, the method comprising:
- providing a scanner including a body having a total volume less than about five square inches and supporting a probe device;
- attaching the scanner to the head by hand and without using tools;
- and
- operating the AFM.
Dependencies are inferred from the claim text.