Resist underlayer film-forming composition and method for forming pattern
AssigneeJsr Corporation
InventorsShin-ya Minegishi, Yushi Matsumura, Shinya Nakafuji, Kazuhiko Komura, Takanori Nakano, Satoru Murakami, Kyoyu Yasuda, Makoto Sugiura
Life of this patent
Estimating the term…