Transmission Line Characterization Using EM Calibration

A method comprising:

• simulating characteristics of a first integrated circuit device by simulating applying an input signal to first test pads connected to the first integrated circuit device;
• simulating characteristics of a second integrated circuit device by simulating applying the input signal to second test pads connected to the second integrated circuit device;
• and
• performing a de-embedding to the characteristics of the first and the second integrated circuit devices to generate intrinsic characteristics, wherein the intrinsic characteristics are without effects of the first and the second test pads.

A test structure comprising:

• a first integrated circuit device comprising:
• a first transmission line comprising a first ground line and a first signal line parallel to the first ground line;
• a first terminal structure comprising a first ground pad electrically connected to the first ground line and a first signal pad electrically connected to the first signal line;
• and
• a second terminal structure comprising a second ground pad electrically connected to the first ground line and a second signal pad electrically connected to the first signal line, wherein the first and the second terminal structures are connected to opposite ends of the first transmission line;
• and
• a second integrated circuit device in a same chip as the first integrated circuit device, wherein each of the first and the second integrated circuit devices is a stand-alone device, and wherein the second integrated circuit device comprises:
• a second transmission line comprising a second ground line and a second signal line parallel to the second ground line, wherein the second transmission line has a length greater than a length of the first transmission line;
• a third terminal structure comprising a third ground pad electrically connected to the second ground line and a third signal pad electrically connected to the second signal line, wherein the first and the third terminal structures are identical;
• and
• a fourth terminal structure comprising a fourth ground pad electrically connected to the second ground line and a fourth signal pad electrically connected to the second signal line, wherein the third and the fourth terminal structures are connected to opposite ends of the first transmission line, and wherein the second and the fourth terminal structures are identical.