Processing apparatus

A processing apparatus comprising:

• a processing container configured to receive a substrate to be processed through a carrying port and process the substrate using a high-pressure fluid;
• a cover configured to close the carrying port;
• a sealing member formed of an elastic body annularly installed to surround the carrying port when the carrying port is closed by the cover, having a U-shaped longitudinal cross section, and having both ends of a U-shaped part which are curved outward to form curved end portions, and disposed such that an internal space surrounded in the U shape communicates with an internal atmosphere of the processing container;
• a cover member configured to cover the sealing member from the outside of the U-shaped part when seen from a longitudinal cross section of the sealing member in order to restrict deformation of the sealing member;
• and
• a restriction mechanism configured to restrict the cover from retreating by the pressure in the processing container,
• wherein when the carrying port of the processing container is closed by the cover, the curved end portions are brought in contact with the processing container and the cover to airtightly close a gap between the processing container and the cover, and as the pressure in the processing container is increased to widen the gap, the sealing member is pressed and deformed in the cover member by the internal atmosphere of the processing container entering into the internal space, and the curved end portions are widened outward to maintain the gap in an airtightly closed state.

A processing apparatus comprising:

• a processing container configured to receive a substrate to be processed through a carrying port and process the substrate using a high-pressure fluid;
• a groove portion annularly formed to surround the carrying port;
• a sealing member installed in the groove portion along the groove portion;
• a cover closing the carrying port and having a circumferential edge which faces and contacts the sealing member;
• a communicating path configured to allow internal atmospheres of the groove portion and the processing container to communicate with each other;
• and
• a restriction mechanism configured to restrict the cover from retreating by the pressure in the processing container,
• wherein the sealing member is pressurized by the internal atmosphere of the processing container through the communicating path to be pressed to the cover to airtightly close a gap between the groove portion and the cover.