Process for recycling a substrate

Abstract

A process for recycling a support substrate of a material substantially transparent to at least a wavelength of electromagnetic radiation. The process includes providing an initial substrate; forming an intermediate layer on a bonding face of the support substrate having an initial roughness, with the intermediate layer being of a material substantially transparent to at least a wavelength of electromagnetic radiation; forming an electromagnetic radiation absorbing layer either on the bonding face of the initial substrate or on the intermediate layer; bonding the initial substrate to the support substrate via the electromagnetic radiation absorbing layer; and irradiating the electromagnetic radiation absorbing layer through the support substrate and the intermediate layer to induce separation of the support substrate from the initial substrate.

Dependencies are inferred from the claim text.