Extended life textured chamber components and method for fabricating same

An article having a surface patterned to enhance retention of deposited films, comprising:

• a processing chamber component having a macro textured surface formed from engineered features arranged in a predefined pattern that prevents formation of a line of sight surface across textured surface, the engineered features are arranged in a predefined pattern, the engineered features forming the textured surface micro textured to a surface finish of about 100 to about 300 RA.

A method for fabricating a semiconductor chamber component, comprising:

• covering a surface of a chamber component with a mask;
• and
• removing material from the surface of a chamber component to form a plurality of engineered features defining a textured surface, the engineered features arranged to prevent formation of a line of sight surface across textured surface.