Robotic device for substrate transfer applications

A device, comprising:

• a forked member having ends that engage and hold a substrate carrier;
• and
• a pusher that extends between the ends of the forked member, so that the pusher can apply force against the substrate carrier as the forked member is retracted from the substrate carrier.

A device, comprising:

• a plurality of extension members, the extension members having respective gripping members designed to hold a substrate carrier;
• and
• a pushing member between two of the extension members, wherein the pushing member can be moved independently of each of said plurality of extension members, the pushing member maintaining the position of a substrate carrier that has been brought to a desired position by exerting force against the positioned carrier when the extension members are retracted.