US 2012/0235339 A1Published application

Process equipment architecture

AssigneeApplied Materials, Inc.

InventorsJacob Newman, Dinesh Kanawade, Miriam Schwartz, Nir Merry, Michael Thomas Haag

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Abstract

Embodiments of the present invention relate to improvements to single-substrate, multi-chamber processing platform architecture for minimizing fabrication facility floor space requirements. Prior art systems require significant floor space around all sides to allow for adequate installation and servicing. Embodiments of the present invention provide platforms that allow for servicing the chambers and supporting systems via a front and rear of the platform allowing multiple, side-by-side platform placement within a fabrication facility, while providing improved serviceability of the platform components.

Claims10

Dependent claims

A system for substrate processing equipment, comprising:

a first single-substrate, multi-chamber processing platform having a first side and a second side with a central service corridor having a length extending from the first side of the first platform to the second side of the first platform and a width of at least about 36 inches;
a second single-substrate, multi-chamber processing platform having a first side and a second side with a central service corridor having a length extending from the first side of the second platform to the second side of the second platform and a width of at least about 36 inches;
wherein the second side of the first platform is adjacent the first side of the second platform such that the central service corridor of the first platform is substantially aligned with the central service corridor of the second platform.

Dependencies are inferred from the claim text.

Facts

Application: 13/486,960Filed 1 Jun 2012
Priority: 7 Nov 2008
Published: 20 Sep 2012
Term ends: Not estimatedThe source records don’t support an estimate.

Classification2 codes

H10P 72/0462
Apparatus for manufacturing or treating in a plurality of work-stations: characterised by the construction of the processing chambers, e.g.…
H10P
Generic processes or apparatus for the manufacture or treatment of devices covered

Family

Application12/266,970Division · filed 7 Nov 2008
Application13/486,960Division
US 2010/0116205 A1Published application
US 9,508,576 B2Related patent
US 2012/0235339 A1This patent

From the US filing history. Foreign family members aren’t listed.

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