Vapor Delivery System For Use in Imprint Lithography
AssigneeMolecular Imprints, Inc.
InventorsZhengmao Ye, Rick Ramos, Edward Brian Fletcher, Christopher Ellis Jones, Dwayne L. LaBrake
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Abstract
Described are systems and method of using a vapor delivery system for enabling delivery of an adhesion promoter material during an imprint lithography process.
Claims23
A vapor delivery system for delivering a vaporized adhesive material to a substrate for use in an imprint lithography process, the system comprising:
- a reactor chamber configured to retain one or more substrates, the reactor chamber in fluid communication with a vacuum source and further including one or more inlets;
- a fluid retention reservoir configured to retain liquid adhesive material;
- a delivery line connecting the fluid retention reservoir to the one or more inlets of the reaction chamber;
- and
- an inline vaporizer positioned along the delivery line, the inline vaporizer further comprising one or more small diameter coiled tubes.
A vapor delivery system for delivering a vaporized adhesive material to a substrate for use in an imprint lithography process, the system comprising:
- a reactor chamber configured to retain one or more substrates, the reactor chamber in fluid communication with a vacuum source and further including one or more inlets;
- a fluid retention reservoir configured to retain liquid adhesive material;
- a bulk storage reservoir in fluid communication with the fluid retention reservoir;
- a flow controller located between the bulk storage reservoir and the retention reservoir for controlling flow of liquid adhesive material from the bulk storage reservoir to the retention reservoir
- a delivery line connecting the fluid retention reservoir to the one or more inlets of the reaction chamber;
- an inline vaporizer positioned along the delivery line, the inline vaporizer further comprising one or more small diameter coiled tubes;
- and
- a baffle positioned along the delivery line between the vaporizer and the reactor chamber.
A method for delivering a vaporized adhesive material to a substrate for use in an imprint lithography process, the method comprising:
- providing adhesive material in liquid form to a reservoir;
- heating the reservoir to produce gaseous adhesive material;
- directing the gaseous adhesive material through one or more small diameter coiled tubes to produce vaporized adhesive material;
- directing the vaporized adhesive material to a reactor chamber, the reactor chamber containing one or more substrates;
- allowing the vaporized adhesive material to deposit on the one or more substrates.
Dependencies are inferred from the claim text.