Integrated circuit interconnect structure
AssigneeInternational Business Machines Corporation
InventorsHanyi Ding, Ronald G. Filippi, Jong-Ru Guo, Ping-Chuan Wang
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AssigneeInternational Business Machines Corporation
InventorsHanyi Ding, Ronald G. Filippi, Jong-Ru Guo, Ping-Chuan Wang
Estimating the term…
An integrated circuit (IC) interconnect structure that includes a first via positioned in a dielectric and coupled to a high current device at one end, and a buffer metal segment positioned in a dielectric and coupled to the first via at an opposite end thereof. The buffer metal segment includes a plurality of electrically insulating inter-dielectric (ILD) pads forming an ILD cheesing pattern thereon, to direct current. The IC interconnect structure further includes a second via positioned in a dielectric formed over the buffer metal segment and coupled to the buffer metal segment at one end and a metal power line formed in a dielectric and coupled to the second via at an opposite end thereof. The use of the ILD pads on the buffer metal segment enables a more even distribution of current along the metal power line.
An integrated circuit (IC) interconnect structure comprising:
A design structure embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit, the design structure comprising:
A method comprising:
Dependencies are inferred from the claim text.