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US 2011/0253043 A1Published application
Nozzle, Substrate Processing Apparatus Including The Nozzle, And Processing Solution Supply Method Using The Apparatus
AssigneeSamsung Electronics Co., Ltd.
InventorsSeongyoon KIM, Chanuk JEON, Inkyun SHIN
Life of this patent
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Abstract
In one embodiment, the nozzle includes a first body having an open lower surface and a plurality of buffer spaces to store a processing solution therein. A first shutter is disposed at a lower part of the first body to selectively open and close lower surfaces of the buffer spaces, and a driving unit configured to move the first shutter or the first body so that a position of the first shutter is varied relative to the buffer spaces.
Claims21
A nozzle comprising:
- a first body having an open lower surface and comprising a plurality of buffer spaces to store a processing solution;
- a first shutter disposed at a lower part of the first body and configured to selectively open and close lower surfaces of the buffer spaces;
- and
- a driving unit configured to move the first shutter or the first body to vary a position of the first shutter relative to the buffer spaces.
1 more element
A substrate processing apparatus comprising:
- a support member configured to support a substrate;
- a nozzle configured to supply a processing solution to the substrate;
- and
- a nozzle moving member configured to move the nozzle,
- wherein the nozzle includes, a first body having an open lower surface and comprising a plurality of buffer spaces linearly arranged in a first direction to store the processing solution;
- a first shutter disposed at a lower part of the first body, the first shutter including an opening, and the first shutter configured to selectively open and close lower surfaces of the buffer spaces;
- and
- a driving unit configured to move the first shutter or the first body in the first direction to vary a position of the first shutter relative to the buffer spaces.
5 more elements
16-20. (canceled)
A nozzle, comprising:
- a first body, the first body defining at least two internal buffer spaces, the first body defining a first opening from the buffer spaces and a second opening to the buffer spaces;
- a first shutter configured to selectively open and close at least a portion of the first opening from the buffer spaces;
- and
- a second shutter configured to selectively open and close at least a portion of the second opening to the buffer spaces.
1 more element
Dependencies are inferred from the claim text.