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US 2011/0253038 A1Published application
Spin coating device
AssigneeHon Hai Precision Industry Co., Ltd.
InventorSHAO-KAI PEI
Life of this patent
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Abstract
A spin coating device includes a container and a rotating member. The container is used for holding a first solution and includes a sidewall which a plurality of substrates are arranged on. The rotating member is rotatable within the container and includes an inlet and at least one outlet. A second solution flows into the rotating member through the inlet, and flows into the container through the at lease one outlet. A mixture of the first solution and the second solution is spread onto the substrate by centrifugal force of the rotating member.
Claims9
A spin coating device comprising:
- a container for holding a first solution and comprising a sidewall which a plurality of substrates are to be arranged on;
- and
- a rotating member rotatable within the container and comprising an inlet and at least one outlet, wherein a second solution flows into the rotating member through the inlet, and flows into the container through the at lease one outlet, a mixture of the first solution and the second solution is spread onto the substrate by centrifugal force of the rotating member.
Dependencies are inferred from the claim text.