Compound lift pin tip with temperature compensated attachment feature
AssigneeApplied Materials, Inc.
InventorsAlexander S. Polyak, Tom K. Cho, Oscar Gomez
Life of this patent
Estimating the term…
Abstract
A method and apparatus for a lift pin is described. In one embodiment, a lift pin head is described. The lift pin head includes a base member having a body made of a first material having a first coefficient of thermal expansion, and a tip disposed on the base member, the base member having a body made of a second material that is flexible at room temperature and having a second coefficient of thermal expansion, the first coefficient of thermal expansion being less than the second coefficient of thermal expansion.
Claims20
A support pedestal for a vacuum chamber, comprising;
- a support body having a having a plurality of openings formed between two major sides thereof;
- and
- a lift pin disposed in each of the openings, the lift pin comprising:
- an elongated shaft coupled to a head, the head comprising:
- a base member having a body made of a first material, the first material having a first coefficient of thermal expansion;
- and
- a tip disposed on the base member, the base member having a body made of a second material that is flexible at room temperature and having a second coefficient of thermal expansion, the first coefficient of thermal expansion being less than the second coefficient of thermal expansion.
A lift pin adapted for use in a vacuum chamber, the lift pin comprising:
- an elongated shaft coupled to a head, the head comprising:
- a base member having a body made of a first material, the first material having a first coefficient of thermal expansion;
- and
- a tip disposed on the base member, the base member having a body made of a second material that is flexible at room temperature and having a second coefficient of thermal expansion, the first coefficient of thermal expansion being less than the second coefficient of thermal expansion.
A method for processing a substrate, comprising:
- depositing one or more layers onto a substrate disposed on a substrate support in a vacuum deposition chamber;
- and
- lifting the substrate from the substrate support with a lift pin having a tip made of a conformal polymer material disposed on a metallic base, wherein the tip has a coefficient of expansion that is greater than a coefficient of expansion of the metallic base.
Dependencies are inferred from the claim text.