Delivery device
AssigneeRohm and Haas Electronic Materials LLC
InventorsDeodatta Vinayak SHENAI-KHATKHATE, Michael L. Timmons, Charles J. Marsman, Egbert Woelk, Ronald L. DiCarlo, JR.
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Abstract
Delivery devices for delivering solid precursor compounds in the vapor phase to reactors are provided. Such devices include a precursor composition of a solid precursor compound with a layer of packing material disposed thereon. Also provided are methods for transporting a carrier gas saturated with the precursor compound for delivery into such CVD reactors.
Claims4
A vapor phase delivery device comprising an outlet chamber and an inlet chamber comprising packing material, wherein the packing material comprises a stabilizing agent.
Dependencies are inferred from the claim text.