Alloy susceptor with improved properties for film deposition

A method for processing a wafer, comprising:

• providing an alloy susceptor comprising an exterior surface and a wafer contact surface;
• treating the exterior surface to produce a roughness of the exterior surface, wherein the wafer contact surface is not treated;
• coating the roughened exterior surface with a ceramic material, wherein the wafer contact surface is not coated;
• positioning the alloy susceptor comprising the ceramic-coated roughened exterior surface in a wafer process chamber;
• and
• depositing a plurality of layers of a film on the ceramic-coated roughened exterior surface of the alloy susceptor, wherein a first adhesion exists between the plurality of layers of the film and the ceramic material coated on the roughened exterior surface of the alloy susceptor that is greater than a second adhesion that would exist between the plurality of layers of the film and a non-roughened exterior surface of the alloy susceptor without the ceramic material.

A method for processing a wafer, comprising:

• positioning a first wafer on a wafer contact surface of an alloy susceptor that is located in a wafer process chamber, wherein an exterior surface of the alloy susceptor that excludes the wafer contact surface has been treated to produce a roughness of the exterior surface, and that roughened exterior surface has been coated with a material;
• depositing a first film layer on the first wafer and the coated roughened exterior surface of the alloy susceptor;
• positioning a second wafer on the wafer contact surface;
• and
• depositing a second film layer on the second wafer and the coated roughened exterior surface of the alloy susceptor that includes the first film layer;
• wherein a first adhesion exists between the first and second film layers and the material coated on the roughened exterior surface of the alloy susceptor that is greater than a second adhesion that would exist between the first and second film layers and a non-roughened exterior surface of the alloy susceptor without the material.