Method for removing hardened polymer residue
OwnerChung-Kyung Junginventor
Life of this patent
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Abstract
A method for efficiently removing hardened polymer residues generated in the process of forming metal lines. The method includes forming a metal layer over a lower film, forming a sacrificial protective film over the metal layer, forming a photosensitive pattern over the sacrificial protective film, forming a metal line by selectively etching the sacrificial protective film and the metal layer using the photosensitive pattern as a mask such that a residual sacrificial protective film is formed over the metal line, and then removing the residual sacrificial protective film from the metal line.
Claims19
A method comprising:
- forming a metal layer over a lower film;
- forming a sacrificial protective film over the metal layer;
- forming a photosensitive pattern over the sacrificial protective film;
- forming a metal line by selectively etching the sacrificial protective film and the metal layer using the photosensitive pattern as a mask such that a residual sacrificial protective film is formed over the metal line;
- and then
- removing the residual sacrificial protective film from the metal line.
A method comprising:
- forming a metal layer over a semiconductor substrate;
- forming a polymer film over the metal layer;
- forming a photoresist pattern over the polymer film;
- forming a metal line by selectively etching the polymer film and the metal layer such that residual polymers from the polymer film are formed on the metal line;
- and then removing the residual polymers from the metal line.
A method comprising:
- forming a metal layer over a semiconductor substrate;
- forming a polymer film over the metal layer;
- forming a photoresist pattern over the polymer film;
- forming a metal line by selectively etching the polymer film and the metal layer such that residual polymers from the polymer film are formed on the metal line;
- removing the residual polymers from the metal line;
- and then
- performing a cleaning process in order to remove additional residual polymers.
Dependencies are inferred from the claim text.