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US 2010/0167216 A1Published application
Exhaust apparatus, processing apparatus, and device manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorAtsushi Umemura
Life of this patent
Estimating the term…
Abstract
An exhaust apparatus includes a structural member; a vacuum pump configured to exhaust a gas via the structural member; and a regulator configured to regulate a temperature of the structural member. The structural member has first and second end faces and a columnar through hole connecting the first and second end faces to each other. The apparatus is configured such that the vacuum pump exhausts a gas via the through hole.
Claims17
An exhaust apparatus comprising:
- a structural member;
- a vacuum pump configured to exhaust a gas via the structural member;
- and
- a first regulator configured to regulate a temperature of the structural member,
- wherein the structural member has first and second end faces and a columnar through hole connecting the first and second end faces to each other, and
- wherein the apparatus is configured such that the vacuum pump exhausts a gas via the through hole.
3 more elements
A processing apparatus that includes a vacuum vessel and processes an object in the vacuum vessel, the apparatus comprising:
- an exhaust vessel connected to the vacuum vessel;
- a structural member;
- a vacuum pump configured to exhaust a gas from the exhaust vessel via the structural member, the vacuum pump being arranged so as to be oriented in a second direction that differs from a first direction that is an exhaust direction from the vacuum vessel to the exhaust vessel;
- and
- a first regulator configured to regulate a temperature of the structural member,
- wherein the structural member is configured to absorb radiation heat from the vacuum pump along the first direction and to cause a particle to pass along the second direction.
3 more elements
Dependencies are inferred from the claim text.