Resist underlayer composition and method of manufacturing integrated circuit device using the same

A resist underlayer composition, comprising:

• a solvent;
• and
• an organosilane-based polymer, the organosilane-based polymer being a polymerization product of at least one first compound represented by Chemical Formulae 1 to 3 and at least one second compound represented by Chemical Formulae 4 and 5,
• [R1]3Si—(CH2)nR2 [Chemical Formula 1]
• wherein, in the above Chemical Formula 1:
• each R1 is independently a halogen, a hydroxyl group, an alkoxy group, a carboxyl group, an ester group, a cyano group, a haloalkylsulfite group, an alkylamine group, an alkylsilylamine group, or an alkylsilyloxy group,
• n is 0 to 5, and
• R2 is anthracenyl or naphthyl,
• wherein, in the above Chemical Formula 2:
• R3, R4, and R5 are each independently a halogen, a hydroxy group, an alkoxy group, a carboxyl group, an ester group, a cyano group, a haloalkylsulfite group, an alkylamine group, an alkylsilylamine group, or an alkylsilyloxy group, and
• m is 1 to 10,
• [R6]3Si—R7—Si[R6]3 [Chemical Formula 3]
• wherein, in the above Chemical Formula 3:
• each R6 is independently a halogen, a hydroxy group, an alkoxy group, a carboxyl group, an ester group, a cyano group, a haloalkylsulfite group, an alkylamine group, an alkylsilylamine group, or an alkylsilyloxy group, and
• R7 is anthracenylene, naphthalenylene, biphenylene (-Ph-Ph-), terphenylene (-Ph-Ph-Ph-), or quaterphenylene (-Ph-Ph-Ph-Ph-),
• [R8]3Si—R9 [Chemical Formula 4]
• wherein, in the above Chemical Formula 4:
• each R8 is independently a halogen, a hydroxy group, an alkoxy group, a carboxyl group, an ester group, a cyano group, a haloalkylsulfite group, an alkylamine group, an alkylsilylamine group, or an alkylsilyloxy group, and
• R9 is H or a C1 to C6 alkyl group, and
• [R10]3Si—X—Si[R10]3 [Chemical Formula 5]
• wherein, in the above Chemical Formula 5:
• each R10 is independently a halogen, a hydroxy group, an alkoxy group, a carboxyl group, an ester group, a cyano group, a haloalkylsulfite group, an alkylamine group, an alkylsilylamine group, or an alkylsilyloxy group,
• X is a substituted or unsubstituted linear alkylene group, a substituted or unsubstituted branched alkylene group, or an alkylene group including an alkenylene group, an alkynylene group, a heterocyclic group, a urea group, or an isocyanurate group in its main chain.