Inline vacuum processing apparatus, method of controlling the same, and information recording medium manufacturing method

An inline vacuum processing apparatus including a first deposition chamber and a second deposition chamber, comprising:

• a deposition unit configured to cause one deposition chamber of the first deposition chamber and the second deposition chamber to execute a deposition process so as to perform, in the same deposition chamber, the deposition process for a group of a plurality of substrates included in a first lot;
• a process execution unit configured to cause the other deposition chamber where the deposition process is not being performed to execute a process necessary for the deposition process while said one deposition chamber is executing the deposition process;
• a determination unit configured to measure the number of substrates processed in said one deposition chamber and determine whether all substrates included in the first lot have undergone the deposition process;
• and
• a control unit configured to switch, based on a determination result from said determination unit, the process to be executed in each of the first deposition chamber and the second deposition chamber so as to cause said other deposition chamber to execute the deposition process and cause said one deposition chamber to execute the process necessary for the deposition process.