System and method for test structure on a wafer
AssigneeSemiconductor Manufacturing International (Shanghai) Corporation
InventorsWANG JIAN PING, Chin Chang Liao, Waisum Wong
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AssigneeSemiconductor Manufacturing International (Shanghai) Corporation
InventorsWANG JIAN PING, Chin Chang Liao, Waisum Wong
Estimating the term…
System and method for test structure on a wafer. According to an embodiment, the present invention provides a test structure for testing a chip. For example, the test structure and the chip are manufactured on a same substrate material and the testing being conducted is in a temperature-controlled environment. The test structure includes a top structure positioned above the chip. For example, the top structure can be characterized by a first surface area. The top structure includes a first metal material occupying less than 60% of the surface area. The test structure also includes a bottom structure positioned below the chip. For example, the bottom structure can be characterized by a second surface area. The second surface area is substantially equal to the first surface area. The bottom structure includes a first silicon material. The first silicon material occupies substantially all of the second surface area.
A test structure for testing a chip, wherein the test structure and the chip are manufactured on a same substrate material and the testing being conducted is in a temperature-controlled environment, the test structure comprising:
A method for testing a chip using a test structure in a temperature-controlled environment, wherein the chip and the test structure on a same substrate material, the method comprising:
A test structure for testing a chip, wherein the test structure and the chip are manufactured on a same substrate material and the testing being conducted is in a temperature-controlled environment, the test structure comprising:
Dependencies are inferred from the claim text.