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US 2010/0163524 A1Published application
Method for manufacturing susceptor
AssigneeNuFlare Technology, Inc.
InventorsHideki ARAI, Masayoshi Yajima, Kunihiko Suzuki
Life of this patent
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Abstract
A method for manufacturing a susceptor includes: forming a concave pattern in a surface of a substrate to be processed; applying a SiC paste containing a SiC powder and a sintering agent to the surface of the substrate to be processed to fill the concave pattern to form a SiC coating layer; laminating a SiC substrate on the SiC coating layer; and firing the SiC coating layer to form a SiC layer having at least one convex section on the surface of the SiC substrate.
Claims20
A method for manufacturing a susceptor, comprising:
- forming a concave pattern in a surface of a substrate to be processed;
- applying a SiC paste containing a SiC powder and a sintering agent onto the surface of the substrate to be processed to fill the concave pattern to form a SiC coating layer;
- laminating a SiC substrate on the SiC coating layer;
- and
- firing the SiC coating layer to form a SiC layer having convex sections on the surface of the SiC substrate.
2 more elements
Dependencies are inferred from the claim text.