Mounting table structure and processing apparatus

A processing apparatus that performs a process on a target object, the apparatus comprising:

• an evacuable processing chamber having a bottom;
• a mounting table structure configured to mount the target object thereon;
• and
• a gas supply unit configured to supply a gas into the processing chamber,
• wherein the mounting table structure includes:
• a mounting table, including a heating unit and made of a dielectric material, configured to mount the target object thereon;
• a cylindrical supporting column, which is extended upward from the bottom of the processing chamber and made of a dielectric material, configured to detachably support the mounting table;
• a cylindrical protection pipe having an upper end joined to a bottom surface of the mounting table and made of a dielectric material having a diameter smaller than a diameter of the supporting column;
• and
• a functional rod member inserted through an inside of the protection pipe and having an upper end in contact with the mounting table.