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US 2010/0148321 A1Published application
Micro-Electro-Mechanical-System Device with Particles Blocking Function and Method for Making Same
AssigneePixArt Imaging Incorporation, R.O.C.
InventorsCHUAN WEI WANG, SHENG TA LEE
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Abstract
The present invention discloses a MEMS device with particles blocking function, and a method for making the MEMS device. The MEMS device comprises: a substrate on which is formed a MEMS device region; and a particles blocking layer deposited on the substrate.
Claims11
A MEMS device with particles blocking function, comprising:
- a substrate on which is formed a MEMS device region;
- and
- a particles blocking layer deposited on the substrate.
A method for making a MEMS device with particles blocking function, comprising:
- providing a substrate;
- forming a MEMS device region on the substrate;
- and
- depositing a particles blocking layer for blocking particles.
1 more element
Dependencies are inferred from the claim text.